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Precursor Decomposition, Microstructure, and Porosity of Yttria Stabilized Zirconia Thin Films Prepared by Aerosol-Assisted Chemical Vapor Deposition

Authors

  • Meike V. F. Schlupp,

    Corresponding author
    1. Nonmetallic Inorganic Materials, ETH Zürich, Wolfgang-Pauli-Str. 10, 8093 Zürich, Switzerland
    • Nonmetallic Inorganic Materials, ETH Zürich, Wolfgang-Pauli-Str. 10, 8093 Zürich, Switzerland.
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  • Julia Martynczuk,

    1. Nonmetallic Inorganic Materials, ETH Zürich, Wolfgang-Pauli-Str. 10, 8093 Zürich, Switzerland
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  • Michel Prestat,

    1. Nonmetallic Inorganic Materials, ETH Zürich, Wolfgang-Pauli-Str. 10, 8093 Zürich, Switzerland
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  • Ludwig J. Gauckler

    1. Nonmetallic Inorganic Materials, ETH Zürich, Wolfgang-Pauli-Str. 10, 8093 Zürich, Switzerland
    2. International Institute for Carbon Neutral Energy, Research (WPI-I2CNER), Kyushu University, 744 Moto-oka, Nishi-ku, Fukuoka 819-0395, Japan
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Abstract

Microstructures of yttria stabilized zirconia thin films deposited by aerosol assisted chemical vapor deposition (AA-CVD) are correlated with the thermal decomposition behavior of the corresponding metal precursors, zirconium and yttrium 2,4-pentanedionate. Process conditions of AA-CVD are investigated with the aim of producing dense and compact YSZ thin films for applications as gas-tight electrolyte. Based on systematic cross sectional scanning transmission electron microscopy (STEM) investigations and conductivity measurements, the development of percolating nanoporosity is observed in samples prepared at temperatures between 350 °C and 600 °C at standard solution throughput. Compact columnar thin films with bulk conductivity are obtained at 600 °C by reducing the metal content of the precursor solution and at 450 °C by reducing the solution throughput.

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