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  1. 1
    Demetre J Economou, Pulsed plasma etching for semiconductor manufacturing, Journal of Physics D: Applied Physics, 2014, 47, 30, 303001

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  2. 2
    Demetre J. Economou, Tailored ion energy distributions on plasma electrodes, Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films, 2013, 31, 5, 050823

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