On-line state and parameter Identification of positive photoresist development
Article first published online: 17 JUN 2004
Copyright © 1990 American Institute of Chemical Engineers
Volume 36, Issue 7, pages 1046–1053, July 1990
How to Cite
Carroll, T. A. and Ramirez, W. F. (1990), On-line state and parameter Identification of positive photoresist development. AIChE J., 36: 1046–1053. doi: 10.1002/aic.690360711
- Issue published online: 17 JUN 2004
- Article first published online: 17 JUN 2004
- Manuscript Revised: 8 JUN 1990
- Manuscript Received: 18 JAN 1990
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