Characterization of sputtered BZT thin films for MCM: Multichip module
Article first published online: 17 JUN 2004
Copyright © 1997 American Institute of Chemical Engineers
Supplement: Special Ceramics Processing Issue
Volume 43, Issue Supplement 11A, pages 2844–2848, 1997
How to Cite
Kamehara, N., Tsukada, M., Cross, J. S. and Kurihara, K. (1997), Characterization of sputtered BZT thin films for MCM: Multichip module. AIChE J., 43: 2844–2848. doi: 10.1002/aic.690431333
- Issue published online: 17 JUN 2004
- Article first published online: 17 JUN 2004
- Manuscript Revised: 13 MAY 1997
- Manuscript Received: 28 OCT 1996
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