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Microelectrode array device: Photolithographic fabrication and electrochemical characterisation

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Abstract

A new type of microelectrode array device has been developed using semiconductor-processing techniques. An array of 15 × 15 square electrodes as small as 1 μm, spaced 100 μm apart, has been fabricated on a silicon chip of dimensions 1.5 × 1.5 mm2. Steady state electrochemistry was performed using these devices in both aqueous and non-aqueous media.

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