Laser cleaning: Laser-induced removal of particles from surfaces
Article first published online: 14 SEP 2004
Copyright © 1993 John Wiley & Sons Ltd.
Advanced Materials for Optics and Electronics
Volume 2, Issue 1-2, pages 63–70, February 1993
How to Cite
Zapka, W., Ziemlich, W., Leung, W. P. and Tam, A. C. (1993), Laser cleaning: Laser-induced removal of particles from surfaces. Adv. Mater. Opt. Electron., 2: 63–70. doi: 10.1002/amo.860020108
- Issue published online: 14 SEP 2004
- Article first published online: 14 SEP 2004
- Manuscript Revised: 12 DEC 1992
- Manuscript Received: 13 JUL 1992
- Laser-induced removal;
- Particle removal;
- Laser cleaning
Pulsed-laser-induced removal of particles from surfaces is a new cleaning technique. This laser cleaning can be performed on dry surfaces as well as on wet surfaces with a micron-thick liquid film during pulsed laser irradiation to provide enhanced removal efficiency. Using the latter technique, to be called ‘steam laser cleaning’ here, we are able to remove epoxy, alumina, silicon or gold particles with diameters in the range 0.1–10 μm from silicon and other surfaces.