Laser direct writing of gold conductors from metallorganic inks

Authors

  • G. B. Scelsi,

    1. Department of Electrical Engineering, University of Palermo and IAIF-CNR, Viale delle Scienze, I-90128, Palermo, Italy
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  • J. Notaro,

    1. Department of Electrical Engineering, University of Palermo and IAIF-CNR, Viale delle Scienze, I-90128, Palermo, Italy
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  • C. Arnone

    Corresponding author
    1. Department of Electrical Engineering, University of Palermo and IAIF-CNR, Viale delle Scienze, I-90128, Palermo, Italy
    • Department of Electrical Engineering, University of Palermo and IAIF-CNR, Viale delle Scienze, I-90128, Palermo, Italy
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Abstract

Laser deposition of gold lines from spin-on metallorganic (MO) precursors has been studied. A readily available and relatively low-cost commercial MO ink has been used to write gold interconnects on different substrates. The physical properties of the ink, its laser-firing process on oxidised silicon substrates and its electrical characterisation are presented here, together with the experimental procedure needed for obtaining low-resistivity deposits.

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