• Microlithography;
  • Resists;
  • Electronic materials


Continued advances in mocroelectronic device fabrication are trying the limits of conventional lithographic techniques. In particular, conventional photoresist materials are not appropriate for use with the new technologies that will be necessary for sub-0.5 μm lithography. One approach to the desing of new resist chemistries involves the concept of chemical amplification, where one photochemical event can lead to a cascade of subsequent reactions that effect a change in solubility of the parent material. The most well-known chemically amplified resists utilise photchemically generated acid to catalyse crosslinking or deprotection reactions. This paper reviews the acid generator, crosslinking, deprotection and depolymerisation chemistries that have been evaluated for chemical amplification resist processes. Additionaly, process characteristics and resist performance relative to the process environment are addressed.