Characterisation of TiN films prepared by electron shower, arc ion-plating and sputtering methods
Article first published online: 14 SEP 2004
Copyright © 1995 John Wiley & Sons Ltd.
Advanced Materials for Optics and Electronics
Volume 5, Issue 4, pages 191–198, July/August 1995
How to Cite
Yumoto, H., Kaneko, K., Ishihara, M., Akasi, K. and Kaneko, T. (1995), Characterisation of TiN films prepared by electron shower, arc ion-plating and sputtering methods. Adv. Mater. Opt. Electron., 5: 191–198. doi: 10.1002/amo.860050403
- Issue published online: 14 SEP 2004
- Article first published online: 14 SEP 2004
- Manuscript Accepted: 16 JAN 1995
- Manuscript Received: 3 JAN 1995
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