Advanced Materials for Optics and Electronics

Cover image for Advanced Materials for Optics and Electronics

March/April 1994

Volume 4, Issue 2

Pages fmi–fmi, 53–178

Currently known as: Advanced Functional Materials

  1. Masthead

    1. Top of page
    2. Masthead
    3. Guest Editorial
    4. Articles
    5. Diary of conferences and symposia
    1. Masthead (page fmi)

      Version of Record online: 14 SEP 2004 | DOI: 10.1002/amo.860040201

  2. Guest Editorial

    1. Top of page
    2. Masthead
    3. Guest Editorial
    4. Articles
    5. Diary of conferences and symposia
    1. Guest editorial (page 53)

      Richard G. Jones

      Version of Record online: 14 SEP 2004 | DOI: 10.1002/amo.860040202

  3. Articles

    1. Top of page
    2. Masthead
    3. Guest Editorial
    4. Articles
    5. Diary of conferences and symposia
    1. Microlithography: An overview (pages 55–74)

      D. Brambley, B. Martin and P. D. Prewett

      Version of Record online: 14 SEP 2004 | DOI: 10.1002/amo.860040203

    2. Novolac-based resists (pages 75–82)

      Makoto Hanabata

      Version of Record online: 14 SEP 2004 | DOI: 10.1002/amo.860040204

    3. Chemically amplified resists: Chemistry and processes (pages 83–93)

      E. Reichmanis, F. M. Houlihan, O. Nalamasu and T. X. Neenan

      Version of Record online: 14 SEP 2004 | DOI: 10.1002/amo.860040205

    4. Polymeric silicon-containing resist materials (pages 95–127)

      R. D. Miller and G. M. Wallraff

      Version of Record online: 14 SEP 2004 | DOI: 10.1002/amo.860040206

    5. Silylation and dry procession (pages 129–138)

      Bruno Roland

      Version of Record online: 14 SEP 2004 | DOI: 10.1002/amo.860040207

    6. Electron beam and X-ray resists (pages 139–153)

      Richard G. Jones and Philip C. Miller Tate

      Version of Record online: 14 SEP 2004 | DOI: 10.1002/amo.860040208

    7. Modelling of resist performance (pages 165–175)

      Mark A. Hartney

      Version of Record online: 14 SEP 2004 | DOI: 10.1002/amo.860040210

  4. Diary of conferences and symposia

    1. Top of page
    2. Masthead
    3. Guest Editorial
    4. Articles
    5. Diary of conferences and symposia

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