Bergauf-Diffusion des Phosphors im Silizium
Article first published online: 14 MAR 2006
Copyright © 1988 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Annalen der Physik
Volume 500, Issue 2, pages 81–101, 1988
How to Cite
Maser, K. (1988), Bergauf-Diffusion des Phosphors im Silizium. Ann. Phys., 500: 81–101. doi: 10.1002/andp.19885000202
- Issue published online: 14 MAR 2006
- Article first published online: 14 MAR 2006
- Manuscript Received: 14 NOV 1985
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