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Keywords:

  • Surface plasmon resonance;
  • optical sensors;
  • Semiconductor materials

This work is related to the development of an integrated Surface Plasmon Resonance (SPR) sensor on silicon platform. The optical properties of metallic nanogratings fabricated on the semiconductor structure allow direct plasmonic detection in transmission mode. Specially designed angular interrogation method provides a periodic signal with phase dependent on the conditions of surface plasmon excitation. Proposed technique leads to sensitivity better than 10−6 RIU for conventional SPR Kretschmann configuration and was tested on the integrated Si-based nanoplasmonic chip. Developed concept is promising for low-cost mono and multi -sensing applications by portable or stationary platforms.