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Uniform, Axial-Orientation Alignment of One-Dimensional Single-Crystal Silicon Nanostructure Arrays

Authors

  • Kuiqing Peng Dr.,

    1. Department of Materials Sciences and Engineering, Tsinghua University, Beijing, 100084, China, Fax: (+86) 10-6277-2507
    2. Department of Physics and Materials Science, Center of Super-Diamond and Advanced Films (COSDAF), City University of Hong Kong, Hong Kong SAR, China
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  • Yin Wu,

    1. Department of Materials Sciences and Engineering, Tsinghua University, Beijing, 100084, China, Fax: (+86) 10-6277-2507
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  • Hui Fang,

    1. Department of Materials Sciences and Engineering, Tsinghua University, Beijing, 100084, China, Fax: (+86) 10-6277-2507
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  • Xiaoyan Zhong,

    1. Department of Materials Sciences and Engineering, Tsinghua University, Beijing, 100084, China, Fax: (+86) 10-6277-2507
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  • Ying Xu,

    1. Department of Materials Sciences and Engineering, Tsinghua University, Beijing, 100084, China, Fax: (+86) 10-6277-2507
    2. Institute of Solar Energy Research, Beijing 100084, China
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  • Jing Zhu Prof.

    1. Department of Materials Sciences and Engineering, Tsinghua University, Beijing, 100084, China, Fax: (+86) 10-6277-2507
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  • This work was supported by the National Natural Science Foundation, National 973 Project of the People's Republic of China, and 985 Project of Tsinghua University.

Abstract

original image

Feine Kratzer auf der Oberfläche: Eine einfache Ätztechnik, die von einem Ag-Nanopartikelnetzwerk unterstützt wird und großflächige 1D-Anordnungen von Siliciumnanostrukturen mit der gewünschten Orientierung und Dotierungscharakteristik liefert, wird vorgestellt (siehe Bild). Aus den experimentellen Befunden wird ein Mechanismus für das hoch selektive Ätzen abgeleitet.

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