Communication

Mechanical and Dielectric Properties of Pure-Silica-Zeolite Low-k Materials†

  1. Zijian Li Dr.1,
  2. Mark C. Johnson2,
  3. Minwei Sun1,
  4. E. Todd Ryan Dr.3,
  5. David J. Earl Dr.4,
  6. Wolfgang Maichen Dr.5,
  7. Jeremy I. Martin Dr.3,
  8. Shuang Li Dr.1,
  9. Christopher M. Lew1,
  10. Junlan Wang Prof.2,
  11. Michael W. Deem Dr.4,
  12. Mark E. Davis Prof.6,
  13. Yushan Yan Prof.1

Article first published online: 23 AUG 2006

DOI: 10.1002/anie.200602036

Issue

Angewandte Chemie International Edition

Angewandte Chemie International Edition

Volume 45, Issue 38, pages 6329–6332, September 25, 2006

Additional Information

How to Cite

Li, Z., Johnson, M. C., Sun, M., Ryan, E. T., Earl, D. J., Maichen, W., Martin, J. I., Li, S., Lew, C. M., Wang, J., Deem, M. W., Davis, M. E. and Yan, Y. (2006), Mechanical and Dielectric Properties of Pure-Silica-Zeolite Low-k Materials. Angew. Chem. Int. Ed., 45: 6329–6332. doi: 10.1002/anie.200602036

Author Information

  1. 1

    Department of Chemical and Environmental Engineering, University of California, Riverside, CA 92521, USA, Fax: (+1) 951-827-5696

  2. 2

    Department of Mechanical Engineering, University of California, Riverside, CA 92521, USA

  3. 3

    Advanced Micro Devices Inc. Hopewell Junction, NY 12533, USA

  4. 4

    Department of Bioengineering, Physics and Astronomy, Rice University, Houston, TX 77251, USA

  5. 5

    Teradyne Inc. Agoura Hills, CA 91301, USA

  6. 6

    Department of Chemical Engineering, California Institute of Technology, Pasadena, CA 91125, USA

  1. †

    We acknowledge the NSF (CTS-0404376), Advanced Micro Devices Inc., Engelhard Corporation, and UC-Discovery Grant for their financial support. We thank Dr. S. I. Zones of ChevronTexaco for his help on B-CHA single-crystal synthesis. k=Dielectric constant.

Publication History

  1. Issue published online: 19 SEP 2006
  2. Article first published online: 23 AUG 2006
  3. Manuscript Received: 23 MAY 2006

Funded by

  • NSF. Grant Number: CTS-0404376
  • Advanced Micro Devices Inc.
  • Engelhard Corporation
  • UC-Discovery Grant

SEARCH

SEARCH BY CITATION

ARTICLE TOOLS

View Full Article with Supporting Information (HTML) Get PDF (316K)

Keywords:

  • mechanical properties;
  • porous materials;
  • silicates;
  • thin films;
  • zeolites
Thumbnail image of graphical abstract

Specialk: Pure silica zeolites (PSZs) have been shown experimentally to display a remarkably higher elastic modulus than amorphous porous silicas at any given porosity or dielectric constant (k) value as a result of their crystalline structure. The combined experimental and theoretical findings suggest that PSZs have the necessary properties for use as the next generation of low-k insulators.

View Full Article with Supporting Information (HTML) Get PDF (316K)