Get access

Mechanical and Dielectric Properties of Pure-Silica-Zeolite Low-k Materials

Authors


  • We acknowledge the NSF (CTS-0404376), Advanced Micro Devices Inc., Engelhard Corporation, and UC-Discovery Grant for their financial support. We thank Dr. S. I. Zones of ChevronTexaco for his help on B-CHA single-crystal synthesis. k=Dielectric constant.

Abstract

original image

Specialk: Pure silica zeolites (PSZs) have been shown experimentally to display a remarkably higher elastic modulus than amorphous porous silicas at any given porosity or dielectric constant (k) value as a result of their crystalline structure. The combined experimental and theoretical findings suggest that PSZs have the necessary properties for use as the next generation of low-k insulators.

Ancillary