We acknowledge the NSF (CTS-0404376), Advanced Micro Devices Inc., Engelhard Corporation, and UC-Discovery Grant for their financial support. We thank Dr. S. I. Zones of ChevronTexaco for his help on B-CHA single-crystal synthesis. k=Dielectric constant.
Mechanical and Dielectric Properties of Pure-Silica-Zeolite Low-k Materials†
Version of Record online: 23 AUG 2006
Copyright © 2006 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Angewandte Chemie International Edition
Volume 45, Issue 38, pages 6329–6332, September 25, 2006
How to Cite
Li, Z., Johnson, M. C., Sun, M., Ryan, E. T., Earl, D. J., Maichen, W., Martin, J. I., Li, S., Lew, C. M., Wang, J., Deem, M. W., Davis, M. E. and Yan, Y. (2006), Mechanical and Dielectric Properties of Pure-Silica-Zeolite Low-k Materials. Angew. Chem. Int. Ed., 45: 6329–6332. doi: 10.1002/anie.200602036
- Issue online: 19 SEP 2006
- Version of Record online: 23 AUG 2006
- Manuscript Received: 23 MAY 2006
- NSF. Grant Number: CTS-0404376
- Advanced Micro Devices Inc.
- Engelhard Corporation
- UC-Discovery Grant
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