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Keywords:

  • electron microscopy;
  • mass spectrometry;
  • nanostructures;
  • scanning probe lithography;
  • surface chemistry
Thumbnail image of graphical abstract

Quick as a flash: High-speed scanning probe lithography in perfluorooctane leads to direct deposition of fluorinated amorphous carbon at velocities in the cm s−1 range. Features as small as 27 nm are fabricated on 100-μm2 areas within seconds. The nanoscale patterns are characterized by using photoelectron emission microscopy and secondary ion mass spectrometry.