Mechanical and Dielectric Properties of Pure-Silica-Zeolite Low-k Materials (pages 6329–6332)
Zijian Li, Mark C. Johnson, Minwei Sun, E. Todd Ryan, David J. Earl, Wolfgang Maichen, Jeremy I. Martin, Shuang Li, Christopher M. Lew, Junlan Wang, Michael W. Deem, Mark E. Davis and Yushan Yan
Version of Record online: 23 AUG 2006 | DOI: 10.1002/anie.200602036
Specialk: Pure silica zeolites (PSZs) have been shown experimentally to display a remarkably higher elastic modulus than amorphous porous silicas at any given porosity or dielectric constant (k) value as a result of their crystalline structure. The combined experimental and theoretical findings suggest that PSZs have the necessary properties for use as the next generation of low-k insulators.