Special Issue Article
Organosilicate polymer e-beam resists with high resolution, sensitivity and stability
Article first published online: 29 APR 2013
Copyright © 2013 John Wiley & Sons, Ltd.
Applied Organometallic Chemistry
Special Issue: Organic/Inorganic Hybrid Materials
Volume 27, Issue 11, pages 644–651, November 2013
How to Cite
2013), Organosilicate polymer e-beam resists with high resolution, sensitivity and stability, Applied Organometallic Chemistry. doi: 10.1002/aoc.2985, , , , , , , and (
- Issue published online: 31 OCT 2013
- Article first published online: 29 APR 2013
- Manuscript Accepted: 28 FEB 2013
- Manuscript Revised: 26 FEB 2013
- Manuscript Received: 6 NOV 2012
Supporting information may be found in the online version of this article.
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