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Preparation of low refractive index fluorinated materials for antireflection coatings

Authors

  • Bo-Tau Liu,

    Corresponding author
    1. Department of Chemical and Materials Engineering, National Yunlin University of Science and Technology, Yunlin, Taiwan 64002
    • Department of Chemical and Materials Engineering, National Yunlin University of Science and Technology, Yunlin, Taiwan 64002
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  • Wei-De Yeh,

    1. Department of Chemical and Materials Engineering, National Yunlin University of Science and Technology, Yunlin, Taiwan 64002
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  • Wei-Hong Wang

    1. Chemical Systems Research Division, Chung-Shan Institute of Science and Technology, Tao-Yuan, Taiwan 32599
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Abstract

Novel low refractive index fluorinated polymers were prepared from perfluoroalkylsilane and polyethoxysiloxane by a sol-gel technique for antireflection applications. Perfluoroalkylsilane having low refractive index fluoroalkyl groups incorporate polyethoxysiloxane by condensation of their siloxane groups to improve the adhesion and hardness of the fluorinated polymers. Syntheses and characteristics of the fluorinated polymers were investigated by the studies of FTIR, GPC, UV–vis, ellipsometry, and mechanical tests. The experimental results reveal that the refractive index and hardness of the coating using the optimal fluorinated polymer were about 1.39 and 3H, respectively, which meet the requirements in practical applications. It was also found that the fluorinated polymer made from polyethoxysiloxane had a better hardness than that made from tetraethyl orthosilicate. © 2010 Wiley Periodicals, Inc. J Appl Polym Sci, 2010

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