SEARCH

SEARCH BY CITATION

Keywords:

  • photochemistry;
  • irradiation;
  • properties and characterization

ABSTRACT

A molecular glass resist with an ionic photoacid generator and a single protection group (MR-1) has been developed. MR-1 exhibited good thermal properties, such as a 5% weight loss temperature (Td5%) of 167°C and a glass transition temperature (Tg) of 80°C. MR-1 showed the good sensitivity of 80 μC/cm2 and high contrast of 4.9 with e-beam exposure (50 keV). A relatively high resolution of 50 nm and low Line-Edge-Roughness of 3.8 nm were obtained by e-beam exposure (100 keV). © 2013 Wiley Periodicals, Inc. J. Appl. Polym. Sci. 2014, 131, 39769.