Regular Paper

Identification, control and hysteresis compensation of a 3 DOF metrological AFM

  1. Roel Merry1,
  2. Mustafa Uyanik1,
  3. René van de Molengraft1,
  4. Richard Koops2,
  5. Marijn van Veghel2,
  6. Maarten Steinbuch1

Article first published online: 27 APR 2009

DOI: 10.1002/asjc.89

Issue

Asian Journal of Control

Asian Journal of Control

Special Issue: Special Issue on “Advanced Control Methods for Scanning Probe Microscopy”

Volume 11, Issue 2, pages 130–143, March 2009

Additional Information

How to Cite

Merry, R., Uyanik, M., van de Molengraft, R., Koops, R., van Veghel, M. and Steinbuch, M. (2009), Identification, control and hysteresis compensation of a 3 DOF metrological AFM. Asian Journal of Control, 11: 130–143. doi: 10.1002/asjc.89

Author Information

  1. 1

    Eindhoven University of Technology, Department of Mechanical Engineering, Control Systems Technology Group, P.O. Box 513, 5600 MB Eindhoven, The Netherlands

  2. 2

    NMi Van Swinden Laboratorium, Thijsseweg 11, 2629 JA Delft, The Netherlands

Publication History

  1. Issue published online: 27 APR 2009
  2. Article first published online: 27 APR 2009
  3. Manuscript Accepted: 8 AUG 2008
  4. Manuscript Received: 7 FEB 2008

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