This work was supported in part by Agilent Technologies, Inc., the US National Science Foundation (NSF Grant CMMI-0700877), and the Miller Institute for Basic Research in Science at the University of California at Berkeley.
Brief Paper
A comparison of control architectures for atomic force microscopes†
Article first published online: 27 APR 2009
DOI: 10.1002/asjc.93
Copyright © 2009 John Wiley and Sons Asia Pte Ltd and Chinese Automatic Control Society
Issue
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Asian Journal of Control
Special Issue: Special Issue on “Advanced Control Methods for Scanning Probe Microscopy”
Volume 11, Issue 2, pages 175–181, March 2009
Additional Information
How to Cite
Butterworth, J. A., Pao, L. Y. and Abramovitch, D. Y. (2009), A comparison of control architectures for atomic force microscopes. Asian Journal of Control, 11: 175–181. doi: 10.1002/asjc.93
- †
Publication History
- Issue published online: 27 APR 2009
- Article first published online: 27 APR 2009
- Manuscript Accepted: 10 DEC 2008
- Manuscript Revised: 2 OCT 2008
- Manuscript Received: 16 FEB 2008
- Abstract
- Article
- References
- Cited By
Keywords:
- Atomic force microscope;
- feedforward control
Abstract
We evaluate the performance of two control architectures applied to atomic force microscopes (AFM). Feedback-only control is a natural solution and has been applied widely. Expanding on that, combining feedback controllers with plant-injection feedforward filters has been shown to greatly improve tracking performance in AFMs. Alternatively, performance can also be improved by the use of a closed-loop-injection feedforward filter applied to the reference input before it enters the feedback loop. In this paper, we compare the plant-injection architecture with the closed-loop-injection architecture when used in controlling AFMs. In particular, we provide experimental results demonstrating the closed-loop-injection architecture yields better tracking performance of a raster scan. Copyright © 2009 John Wiley and Sons Asia Pte Ltd and Chinese Automatic Control Society

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