This article was published online on 31 July 2013. An error was subsequently identified in the online publication date. This notice indicates that the online publication date has been corrected [18 September 2013].
Statistics for microelectronics†
Article first published online: 31 JUL 2013
Copyright © 2013 John Wiley & Sons, Ltd.
Applied Stochastic Models in Business and Industry
Special Issue: Special Issue on Statistics and Microelectronics
Volume 29, Issue 4, pages 315–318, July/August 2013
How to Cite
Borgoni, R., Deldossi, L., Radaelli, L. and Zappa, D. (2013), Statistics for microelectronics. Appl. Stochastic Models Bus. Ind., 29: 315–318. doi: 10.1002/asmb.1994
- Issue published online: 12 AUG 2013
- Article first published online: 31 JUL 2013
- Manuscript Accepted: 20 JUN 2013
- Manuscript Revised: 19 JUN 2013
- Manuscript Received: 14 JUN 2013
Vol. 30, Issue 4, 517, Article first published online: 24 OCT 2013
- semiconductor manufacturing;
- integrated circuit;
- process control
This paper introduces a special issue entirely devoted to the topic ’Statistics for Microelectronics’. The relevance of the theme for this journal is due to both the primary role that microelectronics has in many business activities of the modern society and to the complexity of the production process of integrated circuits that are obtained by several different steps performed on a wafer (i.e., a thin silicon slice of a few inches of diameter). Advanced statistical methods are necessary to monitor and improve this process because the yield of this industrial manufacturing is typically tiny and requires a very high precision. After a brief review of the semiconductor manufacturing process, we point out how statistical methodologies can contribute to this. Finally, we introduce the papers that discuss some key aspects of this subject. Copyright © 2013 John Wiley & Sons, Ltd.