RF MEMS and NEMS technology, devices, and applications
Version of Record online: 17 NOV 2005
© 2005 Lucent Technologies Inc.
Bell Labs Technical Journal
Special Issue: Nanotechnology
Volume 10, Issue 3, pages 29–59, Autumn (Fall) 2005
How to Cite
Gammel, P., Fischer, G. and Bouchaud, J. (2005), RF MEMS and NEMS technology, devices, and applications. Bell Labs Tech. J., 10: 29–59. doi: 10.1002/bltj.20103
- Issue online: 17 NOV 2005
- Version of Record online: 17 NOV 2005
- Manuscript Accepted: JUN 2005
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