MEMS-based force sensor: Design and applications
Article first published online: 17 NOV 2005
© 2005 Lucent Technologies Inc.
Bell Labs Technical Journal
Special Issue: Nanotechnology
Volume 10, Issue 3, pages 61–80, Autumn (Fall) 2005
How to Cite
López, D., Decca, R. S., Fischbach, E. and Krause, D. E. (2005), MEMS-based force sensor: Design and applications. Bell Labs Tech. J., 10: 61–80. doi: 10.1002/bltj.20104
- Issue published online: 17 NOV 2005
- Article first published online: 17 NOV 2005
- Manuscript Accepted: JUN 2005
Micromachined force detectors are extremely sensitive instruments capable of measuring forces as small as 10 −15 N. We describe one such instrument that combines a novel micromachined torsional oscillator with an interferometric position-sensing mechanism that allows fine control of vertical scans. The design, fabrication, and operation of MEMS-based force sensors are described. The sensitivity and unique features of micromachined torsional oscillators allow us to undertake experiments that set new constraints on corrections to Newtonian gravitational forces at separations below 1 mm. Moreover, the measurements provide the most precise characterization of quantum vacuum fluctuation forces to date. © 2005 Lucent Technologies Inc.