MEMS-based force sensor: Design and applications
Version of Record online: 17 NOV 2005
© 2005 Lucent Technologies Inc.
Bell Labs Technical Journal
Special Issue: Nanotechnology
Volume 10, Issue 3, pages 61–80, Autumn (Fall) 2005
How to Cite
López, D., Decca, R. S., Fischbach, E. and Krause, D. E. (2005), MEMS-based force sensor: Design and applications. Bell Labs Tech. J., 10: 61–80. doi: 10.1002/bltj.20104
- Issue online: 17 NOV 2005
- Version of Record online: 17 NOV 2005
- Manuscript Accepted: JUN 2005
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