Capacitive MEMS microphones
Article first published online: 17 NOV 2005
© 2005 Lucent Technologies Inc.
Bell Labs Technical Journal
Special Issue: Nanotechnology
Volume 10, Issue 3, pages 187–198, Autumn (Fall) 2005
How to Cite
Elko, G. W., Pardo, F., López, D., Bishop, D. and Gammel, P. (2005), Capacitive MEMS microphones. Bell Labs Tech. J., 10: 187–198. doi: 10.1002/bltj.20113
- Issue published online: 17 NOV 2005
- Article first published online: 17 NOV 2005
- Manuscript Accepted: JUL 2005
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