X-Ray Diffraction as a Local Probe Tool

Abstract

For the structural characterization of nanoscale objects, X-ray diffraction is widely used as a technique complementing local probe analysis methods such as scanning electron microscopy and transmission electron microscopy. Details on strain distributions, chemical composition, or size and shape of nanostructures are addressed. X-ray diffraction traditionally obtains very good statistically averaged properties over large ensembles—provided this averaging is meaningful for ensembles with sufficiently small dispersion of properties. In many cases, however, it is desirable to combine different analysis techniques on exactly the same nano-object, for example, to gain a more detailed insight into the interdependence of properties. X-ray beams focused to diameters in the sub-micron range, which are available at third-generation synchrotron sources, allow for such X-ray diffraction studies of individual nano-objects.