Speed Dependence of Thermochemical Nanolithography for Gray-Scale Patterning (pages 2530–2535)
Dr. Keith M. Carroll, Maitri Desai, Dr. Anthony J. Giordano, Prof. Jan Scrimgeour, Prof. William P. King, Prof. Elisa Riedo and Prof. Jennifer E. Curtis
Version of Record online: 26 MAY 2014 | DOI: 10.1002/cphc.201402168
Speed control: Thermochemical nanolithography is a versatile, high-speed patterning technique capable of gray-scale chemical patterning with nanoscale resolution. Localized chemical reactions driven by a thermal cantilever enable controlled submicron variations in a diverse set of materials. Here, the technique is extended by providing a quantitative description of how the cantilever speed alters the reaction rate and controls the extent of product formation at a surface.