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Original Paper
Modelling of Voids in Complex Radio Frequency Plasmas
Article first published online: 28 MAY 2009
DOI: 10.1002/ctpp.200910023
Copyright © 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
1521-3986/asset/cover.gif?v=1&s=4b03e1cc66b0b8a69dc1696d82dc79777f177658 "Contributions to Plasma Physics")
Additional Information
How to Cite
Goedheer, W.J., Land, V. and Venema, J. (2009), Modelling of Voids in Complex Radio Frequency Plasmas. Contrib. Plasma Phys., 49: 199–214. doi: 10.1002/ctpp.200910023
Publication History
- Issue published online: 28 MAY 2009
- Article first published online: 28 MAY 2009
- Manuscript Accepted: 26 MAR 2009
- Manuscript Received: 14 DEC 2008
Funded by
- EURATOM/FOM
- Abstract
- References
- Cited By
Keywords:
- Complex plasma;
- RF discharges;
- hydrodynamic modelling;
- kinetic modelling;
- dusty plasma
Abstract
In this paper hydrodynamic and kinetic approaches to model low pressure capacitively coupled complex radiofrequency discharges are discussed and applied to discharges under microgravity. Experiments in the PKE-Nefedov reactor on board the International Space Station, as well as discharges in which gravity is compensated by means of thermophoresis are simulated with a 2-D cylindrically symmetric hydrodynamic model. Kinetic effects are studied with a 1-D Particle-In-Cell plus Monte Carlo model in which capture and scattering by dust grains is included. Simulations with this model address non-local effects and modulated discharges (© 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)