Dynamics and Electronegativity of Oxygen RF Plasmas
Version of Record online: 9 NOV 2012
Copyright © 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Contributions to Plasma Physics
Special Issue: Progress in Complex Plasmas
Volume 52, Issue 10, pages 836–846, November 2012
How to Cite
Küllig, C., Dittmann, K., Wegner, T., Sheykin, I., Matyash, K., Loffhagen, D., Schneider, R. and Meichsner, J. (2012), Dynamics and Electronegativity of Oxygen RF Plasmas. Contrib. Plasma Phys., 52: 836–846. doi: 10.1002/ctpp.201200048
- Issue online: 9 NOV 2012
- Version of Record online: 9 NOV 2012
- Manuscript Accepted: 6 SEP 2012
- Manuscript Revised: 17 AUG 2012
- Manuscript Received: 25 MAY 2012
- Deutsche Forschungsgemeinschaft (DFG) in the framework of the Sonderforschungsbereich Transregio 24 “Fundamentals of Complex Plasmas”, project B5 & B3
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