Particle in Cell/Monte Carlo Collision Method for Simulation of RF Glow Discharges: Effect of Super Particle Weighting



A parallel Particle in Cell/Monte Carlo Collision (PIC/MCC) numerical code for glow discharge plasma simulations is developed and verified. This method is based on simultaneous solution of the Lorentz equations of motion of super particles, coupled with the Poisson's equation for electric field. Collisions between the particles are modelled by the Monte Carlo method. Proper choice of particle weighting is critically important in order to perform adequate and efficient PIC simulations of plasma. Herein, effects of particle weighting on the simulations of capacitive radio-frequency argon plasma discharges are studied in details. (© 2014 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim)