This work was supported in part by the Academy of Finland (projects 43329 and 44215) and the Finnish National Technology Agency (TEKES).
Atomic Layer Deposition of Photocatalytic TiO2 Thin Films from Titanium Tetramethoxide and Water†
Article first published online: 29 JUN 2004
Copyright © 2004 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Chemical Vapor Deposition
Volume 10, Issue 3, pages 143–148, June, 2004
How to Cite
Pore, V., Rahtu, A., Leskelä, M., Ritala, M., Sajavaara, T. and Keinonen, J. (2004), Atomic Layer Deposition of Photocatalytic TiO2 Thin Films from Titanium Tetramethoxide and Water. Chem. Vap. Deposition, 10: 143–148. doi: 10.1002/cvde.200306289
- Issue published online: 29 JUN 2004
- Article first published online: 29 JUN 2004
- Manuscript Accepted: 17 SEP 2003
- Manuscript Received: 4 JUL 2003
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