This work was performed within the DFG research structure “Schwerpunktprogramm SPP 1119 Anorganische Materialien durch Gasphasensynthese: Interdisziplinäre Ansätze zu Entwicklung, Verständnis und Kontrolle von CVD-Verfahren”, and funding by the DFG under contract KO 1363/14-2 and LA 543/22-3 is gratefully acknowledged. We thank Dr. M. Letzel for assistance with the temperature-dependent mass spectrometry upon evaporation and Iolanda Hattesohl for the SEM and XRD measurements.
CVD with Tri-nbutylphosphine Silver(I) Complexes: Mass Spectrometric Investigations and Depositions†
Version of Record online: 25 APR 2005
Copyright © 2005 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Chemical Vapor Deposition
Volume 11, Issue 4, pages 195–205, April, 2005
How to Cite
Haase, T., Kohse-Höinghaus, K., Bahlawane, N., Djiele, P., Jakob, A. and Lang, H. (2005), CVD with Tri-nbutylphosphine Silver(I) Complexes: Mass Spectrometric Investigations and Depositions. Chem. Vap. Deposition, 11: 195–205. doi: 10.1002/cvde.200406339
- Issue online: 25 APR 2005
- Version of Record online: 25 APR 2005
- Manuscript Accepted: 29 NOV 2004
- Manuscript Received: 25 AUG 2004
- Thin films
Tri-nbutylphosphine silver(I) complexes were synthesized and characterized with respect to their suitability for the CVD of silver thin films. The volatility and thermal stability of these complexes were investigated using temperature-programmed and in-situ mass spectrometry (MS). Complexes with smaller carboxylate ligands showed superior long-term stability and had the advantage of evaporation without decomposition. Careful examination of the fragments detected during evaporation and in a CVD reactor allowed us to propose the gas-phase decomposition mechanisms of some potentially suitable silver precursors. Deposition experiments in a cold-wall CVD reactor using selected precursors resulted in smooth and conductive silver coatings.