MOCVD of the Cubic Zinc Nitride Phase, Zn3N2, Using Zn[N(SiMe3)2]2 and Ammonia as Precursors
Article first published online: 17 OCT 2005
Copyright © 2005 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Chemical Vapor Deposition
Volume 11, Issue 10, pages 409–414, October, 2005
How to Cite
Maile, E. and Fischer, R. A. (2005), MOCVD of the Cubic Zinc Nitride Phase, Zn3N2, Using Zn[N(SiMe3)2]2 and Ammonia as Precursors. Chem. Vap. Deposition, 11: 409–414. doi: 10.1002/cvde.200506383
- Issue published online: 17 OCT 2005
- Article first published online: 17 OCT 2005
- Manuscript Accepted: 29 JUL 2005
- Manuscript Received: 28 FEB 2005
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