We are grateful to the Deutsche Forschungsgemeinschaft (DFG) for financial support within the Priority Program SPP 1119, and to Andrea de Toni for performing the ferrocene experiment.
The Synthesis of ZrO2/SiO2 Nanocomposites by the Two-Step CVD of a Volatile Halogen-Free Zr Alkoxide in a Fluidized-Bed Reactor†
Article first published online: 16 JAN 2007
Copyright © 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Chemical Vapor Deposition
Volume 13, Issue 1, pages 37–41, January, 2007
How to Cite
Xia, W., Wang, Y., Hagen, V., Heel, A., Kasper, G., Patil, U., Devi, A. and Muhler, M. (2007), The Synthesis of ZrO2/SiO2 Nanocomposites by the Two-Step CVD of a Volatile Halogen-Free Zr Alkoxide in a Fluidized-Bed Reactor. Chem. Vap. Deposition, 13: 37–41. doi: 10.1002/cvde.200606533
- Issue published online: 16 JAN 2007
- Article first published online: 16 JAN 2007
- Manuscript Revised: 20 OCT 2006
- Manuscript Received: 26 JUN 2006
- Deutsche Forschungsgemeinschaft (DFG). Grant Number: Priority Program SPP 1119
- Metal–organic CVD;
ZrO2/SiO2 nanocomposites with Zr loadings in the range 0.88 wt % to 12.2 wt % were prepared by a two-step metal-organic (MO)CVD process in a fluidized-bed reactor with the Zr alkoxide [Zr(OiPr)2(tbaoac)2] as the precursor. The high surface area of silica was hardly diminished by the deposition, and the deposited zirconia species were highly dispersed, as indicated by X-ray diffraction (XRD), X-ray photoelectron spectroscopy (XPS), and transmission electron microscopy (TEM) investigations. The XPS data reveal a linear increase of the Zr surface concentration with increasing Zr loading. The high degree of dispersion is attributed to a strong interaction between the zirconia species and the support through the formation of Si-O-Zr bonds. Correspondingly, the intensity of the isolated silanol bands detected by diffuse reflectance infrared Fourier transform spectroscopy (DRIFTS) was found to decrease with increasing Zr loading.