Optimization of the Vaporization of Liquid and Solid CVD Precursors: Experimental and Modeling Approaches
Article first published online: 20 NOV 2007
Copyright © 2007 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Chemical Vapor Deposition
Special Issue: Dedicated to the Memory of Giovanni Battiston
Volume 13, Issue 11, pages 638–643, November, 2007
How to Cite
Maury, F., Duminica, F.-D. and Senocq, F. (2007), Optimization of the Vaporization of Liquid and Solid CVD Precursors: Experimental and Modeling Approaches. Chem. Vap. Deposition, 13: 638–643. doi: 10.1002/cvde.200706600
- Issue published online: 20 NOV 2007
- Article first published online: 20 NOV 2007
- Manuscript Revised: 26 JUL 2007
- Manuscript Received: 6 FEB 2007
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