Full Paper

Investigation on Nanodiamond and Carbon Nanotube-Diamond Nanocomposite Synthesized using RF-PECVD

  1. Guangmin Yang,
  2. Weitao Zheng*,
  3. Hongwei Tian,
  4. Xin Wang,
  5. Qiang Xu,
  6. Jing Cheng,
  7. Yongmin Ho,
  8. Qing Jiang

Article first published online: 15 AUG 2008

DOI: 10.1002/cvde.200706646

Issue

Chemical Vapor Deposition

Chemical Vapor Deposition

Special Issue: Special Issue on Nanodiamond

Volume 14, Issue 7-8, pages 236–240, July/August 2008

Additional Information

How to Cite

Yang, G., Zheng, W., Tian, H., Wang, X., Xu, Q., Cheng, J., Ho, Y. and Jiang, Q. (2008), Investigation on Nanodiamond and Carbon Nanotube-Diamond Nanocomposite Synthesized using RF-PECVD. Chemical Vapor Deposition, 14: 236–240. doi: 10.1002/cvde.200706646

Author Information

  1. Department of Materials Science and Key Laboratory of Automobile Materials of MOE, Jilin University Changchun 130012 (P.R. China)

*Department of Materials Science and Key Laboratory of Automobile Materials of MOE, Jilin University Changchun 130012 (P.R. China).

Publication History

  1. Issue published online: 15 AUG 2008
  2. Article first published online: 15 AUG 2008
  3. Manuscript Revised: 12 NOV 2007
  4. Manuscript Received: 20 SEP 2007

Funded by

  • National Natural Science Foundation of China. Grant Number: 50525204
  • National Key Basic Research and Development Program. Grant Number: 2004CB619301

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Keywords:

  • Nanocomposites;
  • Nanodiamond;
  • RF-PECVD;
  • Synthesis

Full Paper: Nanodiamond and carbon nanotube–diamond nanocomposite films were synthesized on silicon substrates, discharging hydrogen based gas mixture, using radio frequency plasma enhanced chemical vapor deposition (RF-PECVD). Prior to deposition, the silicon substrate was treated using M(NO3)3/Mg(NO3)2.6H2O (M=Co, Fe, Ni). The growth mechanisms for ND and CNTD nanocomposite were discussed.

Abstract

Nanodiamond (ND) and carbon nanotube-diamond (CNTD) nanocomposite films are synthesized on silicon(100) substrates, discharging hydrogen-based gas mixture (methane and hydrogen), using radio frequency plasma-enhanced (RF-PE)CVD. Substrate pretreatment conditions are examined for enhancing microdiamond (MD), ND, CNTD nanocomposite, or carbon nanotube (CNT) nucleation. Well-faceted MD with a low nucleation density, on a silicon substrate, is achieved using a solution of NaOH in water to roughen the silicon substrate, while ND, CNTD nanocomposite, and CNTs are acquired using Co(NO3)2/Mg(NO3)2.6H2O or Fe(NO3)3.9H2O/Mg(NO3)2.6H2O or Ni(NO3)2.6H2O/Mg(NO3)2.6H2O solution in alcohol dripped onto the silicon substrate, which means that pretreatments have a significant influence on grain size, nucleation density, and microstructure of the obtained films. The growth mechanisms for ND and CNTD nanocomposite are discussed.

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