The Academy of Finland is gratefully acknowledged for funding this work.
Etching of Nb2O5 Thin Films by NbCl5†
Version of Record online: 3 DEC 2009
Copyright © 2009 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Chemical Vapor Deposition
Volume 15, Issue 10-12, pages 269–273, December, 2009
How to Cite
Knapas, K., Rahtu, A. and Ritala, M. (2009), Etching of Nb2O5 Thin Films by NbCl5. Chem. Vap. Deposition, 15: 269–273. doi: 10.1002/cvde.200906795
- Issue online: 17 DEC 2009
- Version of Record online: 3 DEC 2009
- Manuscript Revised: 15 JUN 2009
- Manuscript Received: 19 MAR 2009
- The Academy of Finland
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