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Keywords:

  • MOCVD;
  • Titanium 2,5-dimethylpyrrolyl complexes;
  • Titanium dioxide

Abstract

The new titanium 2,5-dimethylpyrrolyl complexes [(Me2C4H2N)Ti(NMe2)3] and [(Me2C4H2N)Ti(µ2-OiPr)(OiPr)2]2 and the previously reported titanium pyrrolyl complex [(C4H4N)Ti(µ2-OiPr)(OiPr)2]2 are synthesized and chemically and structurally characterized. Single-crystal X-ray diffraction (XRD) data show that [(Me2C4H2N)Ti(NMe2)3] is monomeric with a pseudo-tetrahedral geometry and contains an N-σ bonded 2,5-dimethylpyrrolyl ligand. The complexes [(Me2C4H2N)Ti (µ2-OiPr)(OiPr)2]2 and [(C4H4N)Ti(µ2-OiPr)(OiPr)2]2 are dimeric and contain two terminal and two bridging isopropoxy groups and terminal N-σ-bonded pyrrolyl ligands. The complexes [(Me2C4H2N)Ti(NMe2)3] and [(Me2C4H2N)Ti (µ2-OiPr)(OiPr)2]2 are investigated as precursors for the deposition of TiO2 by liquid injection metal-organic (MO)CVD. Titanium oxide films deposited at 450 °C from [(Me2C4H2N)Ti(NMe2)3] contain significantly more carbon impurities (C = 12.7 at.-%) than those grown from [(Me2C4H2N)Ti(µ2-OiPr)(OiPr)2]2 (C = 6.1 at.-%). XRD analysis shows that the titanium oxide films deposited at 450 °C are amorphous.