Deposition of Bio-Integration Ceramic Hydroxyapatite by Pulsed-Pressure MOCVD Using a Single Liquid Precursor Solution


  • This article is part of a special section on CVD of Biomaterials.


Pulsed-pressure (PP) metal-organic(MO)CVD is used to deposit layers of calcium phosphate onto flat bio-medical grade titanium (Ti6Al4V) substrates. Inexpensive calcium lactate and trimethyl phosphate (TMP), combined in a methanol solution, forms the precursor. A range of precursor mixtures is studied by thermogravimetric analysis (TGA) to assess reaction pathways. The surface topography, morphology, composition, and crystallinity are studied over a range of deposition temperatures and precursor concentrations. The resulting films are analyzed by scanning electron microscopy (SEM), energy dispersive spectroscopy (EDS), X-ray diffraction (XRD), Raman spectroscopy (RS), and micro-indentation. The films are continuous and the size of surface structures increases at higher temperatures and precursor concentration. The films consist of amorphous calcium phosphate in elemental Ca/P ratios similar to the standard bio-ceramic, hydroxyapatite (1.66).