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Stoichiometry of Nickel Oxide Films Prepared by ALD

Authors


  • We thank Reinhold Meissner for his invaluable technical support. This work was supported by the German Science Foundation via the DFG Projects NI 616/11-1 (Hamburg) and HE 2100/8-1 (Halle).

Abstract

Nickel oxide films obtained from nickelocene and ozone by atomic layer deposition at 230°C are substoichiometric, but have the crystal structure of NiO. Oxygen can be driven out of the solid by annealing under inert atmosphere, or added into it via aerobic annealing.

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