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Keywords:

  • MOCVD;
  • Aluminium oxide;
  • Aluminium tri-isopropoxide;
  • Kinetics;
  • Modeling

A numerical model for the MetalOrganic CVD of alumina from aluminium tri-isopropoxide (ATI), based on an apparent heterogeneous kinetic law was developed using the Computational Fluid Dynamics (CFD) code Fluent. The kinetic parameters were fitted from experimental deposition rates obtained between 360°C and 496°C at a total pressure of 5Torr. Simulated local profiles of alumina deposition rate allowed reproducing the non uniformity of experimental deposition rates due to the dominance of convective gas transport and the depletion of ATI.