This work was supported by the National Polytechnic Institute of Toulouse through a Bonus Qualité Recherche grant. We are indebted to Mr. Daniel Sadowski and to Miss Rosalia Vasquez Perez for technical assistance.
Local Kinetic Modeling of Aluminum Oxide Metal-Organic CVD From Aluminum Tri-isopropoxide†
Version of Record online: 31 AUG 2011
Copyright © 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Chemical Vapor Deposition
Volume 17, Issue 7-9, pages 181–185, September, 2011
How to Cite
Vergnes, H., Samélor, D., Gleizes, A. N., Vahlas, C. and Caussat, B. (2011), Local Kinetic Modeling of Aluminum Oxide Metal-Organic CVD From Aluminum Tri-isopropoxide. Chem. Vap. Deposition, 17: 181–185. doi: 10.1002/cvde.201004301
- Issue online: 22 SEP 2011
- Version of Record online: 31 AUG 2011
- Manuscript Revised: 27 APR 2011
- Manuscript Received: 17 DEC 2010
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