This work has been supported by the French Midi Pyrénées region council.
Modeling of Silicon CVD into Agglomerates of Sub-micrometer-size Particles in a Fluidized Bed†
Article first published online: 15 DEC 2011
Copyright © 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Chemical Vapor Deposition
Volume 17, Issue 10-12, pages 305–311, December, 2011
How to Cite
Reuge, N. and Caussat, B. (2011), Modeling of Silicon CVD into Agglomerates of Sub-micrometer-size Particles in a Fluidized Bed. Chem. Vap. Deposition, 17: 305–311. doi: 10.1002/cvde.201106888
- Issue published online: 15 DEC 2011
- Article first published online: 15 DEC 2011
- Manuscript Revised: 7 FEB 2011
- Manuscript Received: 20 OCT 2010
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