The authors wish to thank the GdR 3184 - CNRS “SurGeCo” for initiating a fruitful collaboration between all partners.
Organosilicon Polymers Deposition by PECVD and RPECVD on Micropatterned Substrates†
Version of Record online: 25 NOV 2011
Copyright © 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Chemical Vapor Deposition
Volume 17, Issue 10-12, pages 321–326, December, 2011
How to Cite
Supiot, P., Vivien, C., Blary, K. and Rouessac, V. (2011), Organosilicon Polymers Deposition by PECVD and RPECVD on Micropatterned Substrates. Chem. Vap. Deposition, 17: 321–326. doi: 10.1002/cvde.201106902
- Issue online: 15 DEC 2011
- Version of Record online: 25 NOV 2011
- Manuscript Revised: 24 OCT 2011
- Manuscript Received: 22 DEC 2010
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