Thermal Oxidation of Parylene X
Article first published online: 1 SEP 2011
Copyright © 2011 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Chemical Vapor Deposition
Volume 17, Issue 7-9, pages 204–210, September, 2011
How to Cite
Senkevich, J. J. (2011), Thermal Oxidation of Parylene X. Chem. Vap. Deposition, 17: 204–210. doi: 10.1002/cvde.201106904
- Issue published online: 22 SEP 2011
- Article first published online: 1 SEP 2011
- Manuscript Revised: 20 APR 2011
- Manuscript Received: 30 DEC 2010
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