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Supercritical Fluid Chemical Deposition as an Alternative Process to CVD for the Surface Modification of Materials

Authors


  • The authors acknowledge the “Conseil Régional d'Aquitaine” for the PhD grant of E. Garrido the Arkema Company for the financial support.

Abstract

Taking the desirable attributes of CVD and aqueous plating techniques while minimizing the disadvantages of each, supercritical fluid chemical deposition (SFCD) demonstrates itself to be a promising process alternative to enable the fabrication of nanostructured devices. This paper gives information about the SFCD process for metal deposition as an alternative to CVD through various examples of inorganic deposition (films or nanostructures). In particular, the use of SFCD will be demonstrated for the surface modification of carbon nanotubes (CNTs) and their decoration with palladium nanoparticles.

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