The skillful cooperation of Mr. Valerio Corrado and Mr. Franco Benetollo is gratefully acknowledged. FISR–MIUR Poject “Inorganic and hybrid nanosystems for the development and innovation of fuel cells” is gratefully acknowledged for financial assistance.
Zirconocene Alkoxides, Promising Precursors for MOCVD of Zirconium Dioxide Thin Films†
Article first published online: 8 MAY 2012
Copyright © 2012 WILEY-VCH Verlag GmbH & Co. KGaA, Weinheim
Chemical Vapor Deposition
Volume 18, Issue 4-6, pages 151–158, June 2012
How to Cite
Sartori, A., El Habra, N., De Zorzi, C., Sitran, S., Casarin, M., Cavinato, G., Sada, C., Gerbasi, R. and Rossetto, G. (2012), Zirconocene Alkoxides, Promising Precursors for MOCVD of Zirconium Dioxide Thin Films. Chem. Vap. Deposition, 18: 151–158. doi: 10.1002/cvde.201106950
- Issue published online: 6 JUN 2012
- Article first published online: 8 MAY 2012
- Manuscript Revised: 14 DEC 2011
- Manuscript Received: 25 AUG 2011
- Thin films;
- Zirconium oxide;
- Zirconocene alkoxides
Some new volatile bis-cyclopentadienyl zirconium alkoxides of the type Cp2Zr(OR)(OtBu) (R = iPr, Et, Me) is synthesized by the reaction of the corresponding KOR with the intermediate Cp2ZrCl(OtBu). Moreover, an alternative and convenient synthesis of Cp2Zr(OtBu)2, based on the reaction of Cp2ZrCl2 with an excess of tert-butanol and triethylamine, is reported. The obtained compounds are identified by chemical analyses, thermogravimetric measurements, infrared (IR), nuclear magnetic resonance (NMR) spectroscopy, and mass spectrometry (MS). Furthermore, a crystallographic study of Cp2ZrCl(OtBu) is also reported. Cp2Zr(OtBu)2 and Cp2Zr(OiPr)(OtBu) are then used for depositing zirconia thin films of high quality and purity on Si(100) and stainless steel AISI 316 substrates by metal-organic (MO)CVD. The microstructure and composition of the deposits are investigated by X-ray diffraction (XRD) and secondary ion mass spectrometry (SIMS), while their hardness and elastic recovery on the AISI 316 substrate are measured using load-depth nano-indentation tests. The outcomes are consistent with a significant increase in the Berkovich hardness of the coated samples compared to that of bulk AISI 316.